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多層膜ミラーを用いた軟X線結像光学系の開発とEUV露光装置への応用
https://u-hyogo.repo.nii.ac.jp/records/23
https://u-hyogo.repo.nii.ac.jp/records/2394398d44-f6e1-4cec-b511-c225d95b1cac
名前 / ファイル | ライセンス | アクション |
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doctoral thesis_13-3 (7.5 MB)
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要旨 13-3 (282.2 kB)
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Item type | 学位論文 / Thesis or Dissertation(1) | |||||
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公開日 | 2013-12-25 | |||||
タイトル | ||||||
タイトル | 多層膜ミラーを用いた軟X線結像光学系の開発とEUV露光装置への応用 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_db06 | |||||
資源タイプ | doctoral thesis | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
村上, 勝彦
× 村上, 勝彦× Murakami, Katsuhiko |
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公開者 | ||||||
出版者 | 兵庫県立大学 | |||||
学位名 | ||||||
学位名 | 博士(工学) | |||||
学位授与機関 | ||||||
学位授与機関識別子Scheme | kakenhi | |||||
学位授与機関識別子 | 24506 | |||||
学位授与機関名 | 兵庫県立大学大学院 | |||||
学位授与年度 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 2013 | |||||
学位授与年月日 | ||||||
学位授与年月日 | 2013-09-26 | |||||
学位授与番号 | ||||||
学位授与番号 | 乙第42号 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |