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Applied technology development related to multi-layer structure for EUV Optics–for space satellite mounting and semiconductor device manufacturing–
https://u-hyogo.repo.nii.ac.jp/records/136
https://u-hyogo.repo.nii.ac.jp/records/136fc34134f-240e-4c03-9c4a-79a84ee1e1e8
名前 / ファイル | ライセンス | アクション |
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要旨14-2 (242.3 kB)
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Item type | 学位論文 / Thesis or Dissertation(1) | |||||
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公開日 | 2014-12-05 | |||||
タイトル | ||||||
タイトル | Applied technology development related to multi-layer structure for EUV Optics–for space satellite mounting and semiconductor device manufacturing– | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_46ec | |||||
資源タイプ | thesis | |||||
著者 |
村地, 哲徳
× 村地, 哲徳× Murachi, Tetsunori |
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公開者 | ||||||
出版者 | 兵庫県立大学 | |||||
学位名 | ||||||
学位名 | 博士(工学) | |||||
学位授与機関 | ||||||
学位授与機関名 | 兵庫県立大学大学院 | |||||
学位授与年度 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 2014 | |||||
学位授与年月日 | ||||||
学位授与年月日 | 2014-09-22 | |||||
学位授与番号 | ||||||
学位授与番号 | 24506乙第46号 |