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{"_buckets": {"deposit": "e983f886-26bb-4181-939c-036affce33d8"}, "_deposit": {"created_by": 3, "id": "6416", "owners": [3], "pid": {"revision_id": 0, "type": "depid", "value": "6416"}, "status": "published"}, "_oai": {"id": "oai:nitech.repo.nii.ac.jp:00006416", "sets": ["31"]}, "author_link": ["22457", "22460", "8594", "22461", "20810", "9425", "22462", "22458", "22463", "22459"], "item_10001_biblio_info_28": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2017-09", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "9", "bibliographicPageEnd": "5404", "bibliographicPageStart": "5400", "bibliographicVolumeNumber": "46", "bibliographic_titles": [{}, {"bibliographic_title": "Journal of Electronic Materials", "bibliographic_titleLang": "en"}]}]}, "item_10001_description_38": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_description": "application/pdf", "subitem_description_type": "Other"}]}, "item_10001_full_name_27": {"attribute_name": "著者別名", "attribute_value_mlt": [{"nameIdentifiers": [{"nameIdentifier": "8594", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "1000020345945 ", "nameIdentifierScheme": "NRID", "nameIdentifierURI": "http://rns.nii.ac.jp/nr/1000020345945 "}], "names": [{"name": "ニラウラ, マダン"}]}]}, "item_10001_publisher_29": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "Springer"}]}, "item_10001_relation_34": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_name": [{"subitem_relation_name_text": "10.1007/s11664-017-5528-3"}], "subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1007/s11664-017-5528-3", "subitem_relation_type_select": "DOI"}}]}, "item_10001_source_id_30": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "03615235", "subitem_source_identifier_type": "ISSN"}]}, "item_10001_source_id_32": {"attribute_name": "書誌レコードID(NCID)", "attribute_value_mlt": [{"subitem_source_identifier": "AA00697093", "subitem_source_identifier_type": "NCID"}]}, "item_10001_version_type_33": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_ab4af688f83e57aa", "subitem_version_type": "AM"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Yasuda, K.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "20810", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Niraula, Madan", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "8594", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "1000020345945 ", "nameIdentifierScheme": "NRID", "nameIdentifierURI": "http://rns.nii.ac.jp/nr/1000020345945 "}]}, {"creatorNames": [{"creatorName": "Araki, N.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "22463", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Miyata, M.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "22457", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kitagawa, S.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "22458", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kojima, M.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "22459", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Ozawa, J.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "22460", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Tsubota, S.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "22461", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Yamaguchi, T.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "22462", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Agata, Y.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "9425", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2019-03-19"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "NiraulaMadan_2017_A1.pdf", "filesize": [{"value": "780.4 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensefree": "This is a post-peer-review, pre-copyedit version of an article published in Journal of Electronic Materials. The final authenticated version is available online at: http://doi.org/10.1007/s11664-017-5528-3", "licensetype": "license_free", "mimetype": "application/pdf", "size": 780400.0, "url": {"label": "本文_fulltext", "url": "https://nitech.repo.nii.ac.jp/record/6416/files/NiraulaMadan_2017_A1.pdf"}, "version_id": "b0cc7403-e5ff-4b51-9634-f25629b2642e"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Dry Etching Characteristics of MOVPE-Grown CdTe Epilayers in CH4, H2, Ar ECR Plasmas", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Dry Etching Characteristics of MOVPE-Grown CdTe Epilayers in CH4, H2, Ar ECR Plasmas", "subitem_title_language": "en"}]}, "item_type_id": "10001", "owner": "3", "path": ["31"], "permalink_uri": "https://nitech.repo.nii.ac.jp/records/6416", "pubdate": {"attribute_name": "公開日", "attribute_value": "2019-03-19"}, "publish_date": "2019-03-19", "publish_status": "0", "recid": "6416", "relation": {}, "relation_version_is_last": true, "title": ["Dry Etching Characteristics of MOVPE-Grown CdTe Epilayers in CH4, H2, Ar ECR Plasmas"], "weko_shared_id": 3}
Dry Etching Characteristics of MOVPE-Grown CdTe Epilayers in CH4, H2, Ar ECR Plasmas
https://nitech.repo.nii.ac.jp/records/6416
https://nitech.repo.nii.ac.jp/records/6416e568dcf3-3b85-4450-877b-8961b7cd43fa
名前 / ファイル | ライセンス | アクション |
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本文_fulltext (780.4 kB)
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This is a post-peer-review, pre-copyedit version of an article published in Journal of Electronic Materials. The final authenticated version is available online at: http://doi.org/10.1007/s11664-017-5528-3
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2019-03-19 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Dry Etching Characteristics of MOVPE-Grown CdTe Epilayers in CH4, H2, Ar ECR Plasmas | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Yasuda, K.
× Yasuda, K.× Niraula, Madan× Araki, N.× Miyata, M.× Kitagawa, S.× Kojima, M.× Ozawa, J.× Tsubota, S.× Yamaguchi, T.× Agata, Y. |
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著者別名 | ||||||
姓名 | ニラウラ, マダン | |||||
書誌情報 |
en : Journal of Electronic Materials 巻 46, 号 9, p. 5400-5404, 発行日 2017-09 |
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出版者 | ||||||
出版者 | Springer | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 03615235 | |||||
書誌レコードID(NCID) | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00697093 | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1007/s11664-017-5528-3 | |||||
関連名称 | 10.1007/s11664-017-5528-3 | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf |